Optical microswitches are being developed for use in communication and security systems because of their small size and fast response time. However, as the intensity of the light incident on the microswitches increases, the thermal and mechanical responses of the reflective surfaces are becoming a concern. It is important to dissipate heat adequately and to minimize any deformation on the reflective surfaces. To understand the mechanical responses of these microswitches, a set of microstructures have been fabricated and tested to evaluate how the surfaces deform when irradiated with a high-intensity laser beam. To evaluate and further investigate the experimental findings, the coupled physical analysis tool, Calagio, has been applied to simulate the mechanical behavior of these test structures when they are optically heated. Code prediction of the surface displacement will be compared against measurement. Our main objective is to assess the existing material models and our code predictive capability so that it will be used to qualify the performance of micro-switches being developed.

Volume Subject Area:
Microelectromechanical Systems
Topics:
Deformation, Displacement, Heat, Heating, Laser beams, Mechanical behavior, Security, Switches
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