In this paper we present the design, fabrication, and characterization of a MEMS thermal switch. Three switch designs are considered: one in which the conductive material is in the form of liquid-metal micro droplets, one in which the conductive material consists of aligned carbon nanotube arrays, and one in which solid silicon contacts are used. The ratio of thermal resistance in the on and off conditions is used to characterize performance. Based on these measurements the switch incorporating liquid-metal droplets is superior to the other two switches. The liquid-metal switch has a thermal resistance off to on ratio of 168 and can provide heating rates of 905 °C/s.
Dynamic Operation of a MEMS Thermal Switch
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Cho, JH, Richards, CD, Bahr, DF, Richards, RF, & Jiao, J. "Dynamic Operation of a MEMS Thermal Switch." Proceedings of the ASME 2006 International Mechanical Engineering Congress and Exposition. Microelectromechanical Systems. Chicago, Illinois, USA. November 5–10, 2006. pp. 655-660. ASME. https://doi.org/10.1115/IMECE2006-15286
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