Optical Testing of Polycrystalline Silicon Flexure-Type Optical Actuators

Optical actuation is a necessity for the development of alloptical MEMS devices. Optically-powered actuators relying on a photothermal process are limited by overheating and structural damage resulting from the absorption of laser power. Surface micromachined polycrystalline silicon (polysilicon) optical actuators, powered using an 808 nm continuous wave laser, were evaluated for displacement performance and susceptibility to damage. The tested actuators were of a flexure-type design fabricated from either a single 2.25 μm polysilicon layer or a 4.5 μm polysilicon laminate layer, and in three different designs. Displacement of the actuators was linear with power for all tested designs for powers below those that cause damage to the irradiated surface. Maximum displacement observed was in the 7-9 μm range regardless of actuator design. After surface damage is initiated, displacement of the actuator during irradiation recedes in all actuators, with actuators with a 50 μm-wide target surface exhibiting complete recession in their displacement. The return position of the actuators after the irradiated surface has damaged also exhibits recession on the order of 4-5 μm for surfaces damaged with up to 650 mW. Exposing the actuator surfaces to longer irradiation times had no effect on the displacement if the surface had no damage, but resulted in regression of the displacement as the irradiation time increased if the surface had preexisting damage.