This paper presents the fabrication and test of a constant delivery thermopneumatic micropump made of PDMS without any moving part. The driving force of the liquid discharge is the pneumatic pressure of heated air and the suction of liquid is accomplished by the surface tension. The proposed micropump consists of an inlet, an outlet, a pump chamber, two air chambers, two air discharge channels and two air suction channels. The air chambers have electric heaters on the Pyrex glass substrate. Each air chamber is connected the pump chamber through two different air channels which behaves like check valves. The micropump is fabricated through the spincoating process, the lithograph process, the PDMS molding process and etc. The total dimension of the micropump is 11.7 × 8.8 × 0.7 mm3. The discharge volume of the fabricated micropump was measured for various backward pressures ranging from 0 to 20 cmH2O. The micropump discharges 116 nanoliters in 4 seconds for zero discharge pressure when the input voltage is 3.5 V. As the discharge pressure increases, the discharge volume decreases gradually. The discharge volume deviation is less than 15 percent for the discharge pressure range between 5 and 15 cmH2O. This proposed micropump is feasible for disposable transdermal drug delivery systems.

Volume Subject Area:
Microelectromechanical Systems
Topics:
Micropumps, Pressure, Surface tension, Plasma desorption mass spectrometry, Pumps, Suction, Borosilicate glasses, Dimensions, Drug delivery systems, Glass, Manufacturing, Molding, Spin coating, Valves
1.
Van
D. A. L.
,
McGuire
T.
, and
Langer
R.
, “
Small-scale systems for in vivo drug delivery
,”
Nature biotechnology
, vol
21
, no.
10
, pp.
1184
–
1191
, Oct.
2003
.
2.
D. Maillefer, S. Gamper, B. Frehner, P. Balmer, H. Van Lintel, and P. Renaud, “A high-performance silicon micropump for disposable drug delivery systems,” The 14th IEEE international conference on MEMS, pp. 413–417, Jan. 2001.
3.
Charles Grosjean and Yu-Chong Tai, “A Thermopneumatic Peristaltic Micropump”, Proceedings of International Conference on Solid-State and Actuators (Transducer ‘99), pp. 1776–1779, Jun. 1999
4.
D. Maillefer, S. Gamper, B. Frehner, P. Balmer, H. Van Lintel and P. Renaud, “A high-performance silicon micropump for disposable drug delivery systems”, The 14th IEEE International Conference on MEMS, pp. 413–417, Jan. 2001.
5.
Sung-Jin Kim, Yong Bum Shin, Dae-Sik Lee, Haesik Yang, Kyuwon Kim, Se Ho Park and Youn Tae Kim, “Capillary-Driven Passive Confluence Microvalv Based on an Aspect Ratio Concept,” The 6th Korean MEMS Conference, pp.97–100, April. 2004.
6.
Kwang Hyo Chung, Sung-Jin Kim, Hyun Bong Pyo and Hae-sik Yang, “Polymer Microfluidic Device Accomplishing Self-wash and Fluid Replacement via Capillary Force,” The 6th Korean MEMS Conference, pp.331–336, April. 2004.
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