In this paper, PDMS membrane for a large displacement is fabricated by new fabrication process which can be integrated with electrical components on substrates fabricated by conventional microfabrication processes and the performance of the membrane using electromagnetism was evaluated. Rectangular PDMS membranes are designed as 2mm and 3mm in width, respectively and are actuated by Lorentz force induced by current paths spread on the membrane. The PDMS membrane is fabricated by reducing a viscosity of uncured PDMS with dilution and spin coating on the substrate on which electric components generating Lorentz force. Finally, PDMS membrane including electric components is opened by a bulk micromachining. The device is tested in magnetic field induced by Nd-Fe-B magnet whose magnetic flux density is 90G. When applied currents are 20, 25, and 30mA, the maximum deflections of membranes are 1.21, 3.07, and 20.2μm for 1.5mm width membrane and 3.34, 31.0, and 50.9μm for width 3mm membrane, respectively. The large displacement PDMS membrane actuator has potentially various applications such as fluidics, optics, acoustics, and electronics. Currently, we are planning to measure the optical performance of the actuator as a focal tunable liquid lens.

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