This paper presents a model to analyze pull-in phenomenon and dynamics of multi layer microplates using coupled finite element and finite difference methods. First-order shear deformation theory is used to model dynamical system using finite element method, while Finite difference method is applied to solve the nonlinear Reynolds equation of squeeze film damping. Using this model, Pull-in analysis of single layer and multi layer microplates are studied. The results of pull-in analysis are in good agreement with literature. Validating our model by pull-in results, an algorithm is presented to study dynamics of microplates. These simulations have many applications in designing multi layer microplates.

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