Means of measuring temperature and fluid flow in microelectromechanical systems (MEMS) continue to show limitations. This paper discusses the development of a noninvasive optical based temperature mapping technique for use in microsystems. The technique employs the Shack-Hartmann wave-front sensor (SHWFS), with documented accuracy in macroscale applications of ±0.7°C [1]. Microscale models indicate the potential to collect data with the same accuracy. With continued development, fluid flow monitoring by thermally seeding an element of fluid and using the SHWFS to detect the location of this heated element will be possible. This measurement technique can be applied to a variety of microfluidic devices, including biomedical devices, since the temperature "seed" can be small enough to prevent damage to sensitive biological systems.
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ASME 2006 International Mechanical Engineering Congress and
Exposition
November 5–10, 2006
Chicago, Illinois, USA
Conference Sponsors:
- Fluids Engineering Division
ISBN:
0-7918-4770-5
PROCEEDINGS PAPER
Optimal Architecture of Shack Hartmann Wave-Front Sensor for Microfluidic Applications Available to Purchase
S. A. Spiewak
S. A. Spiewak
University of Calgary
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M. J. Cyca
University of Calgary
S. A. Spiewak
University of Calgary
Paper No:
IMECE2006-15165, pp. 167-174; 8 pages
Published Online:
December 14, 2007
Citation
Cyca, MJ, & Spiewak, SA. "Optimal Architecture of Shack Hartmann Wave-Front Sensor for Microfluidic Applications." Proceedings of the ASME 2006 International Mechanical Engineering Congress and Exposition. Fluids Engineering. Chicago, Illinois, USA. November 5–10, 2006. pp. 167-174. ASME. https://doi.org/10.1115/IMECE2006-15165
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