Means of measuring temperature and fluid flow in microelectromechanical systems (MEMS) continue to show limitations. This paper discusses the development of a noninvasive optical based temperature mapping technique for use in microsystems. The technique employs the Shack-Hartmann wave-front sensor (SHWFS), with documented accuracy in macroscale applications of ±0.7°C [1]. Microscale models indicate the potential to collect data with the same accuracy. With continued development, fluid flow monitoring by thermally seeding an element of fluid and using the SHWFS to detect the location of this heated element will be possible. This measurement technique can be applied to a variety of microfluidic devices, including biomedical devices, since the temperature "seed" can be small enough to prevent damage to sensitive biological systems.

1.
McMackin
L.
, “
High speed optical tomography system for quantitative measurement and visualization of dynamic features in a round jet
,”
Experiments in Fluids
, vol.
26
,
1999
, pp.
249
256
.
2.
Kim
H. J.
,
Kihm
K. D.
, and
Allen
J. S.
, “
Examination of ratiometric laser induced fluorescence thermometry for microscale spatial measurement resolution
,”
Int. J. Heat Mass Transfer
, vol.
46
,
2003
, pp.
3967
3974
.
3.
Edle´n
B.
, “
The refractive index of air
,”
Metrologia
, vol.
2
,
1966
, pp.
71
80
.
4.
Birch
K. P.
, and
Downs
M. J.
, “
An Updated Edle´n equation for the refractive index of air
,”
Metrologia
, vol.
30
,
1993
, pp.
155
162
.
5.
Birch
K. P.
, and
Downs
M. J.
, “
Correction to the updated Edle´n equation for the refractive index of air
,”
Metrologia
, vol.
31
,
1994
, pp.
315
316
.
6.
Shack
R. V.
Production and use of a lenticular Hartmann screen
,”
J. Opt. Soc. Am.
, vol.
61
,
1971
, pp.
656
656
.
7.
Fried
D. L.
, “
Least-square fitting a wave-front distortion estimate to an array of phase-difference measurements
,”
J. Opt. Soc. Am.
, vol.
67
,
1977
, pp.
370
375
.
8.
Southwell
W. H.
, “
Wave-front estimation from wavefront slope measurements
,”
J. Opt. Soc. Am.
, vol.
70
,
1980
, pp.
998
1006
.
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