Micro-cantilevers have recently evolved into a key sensor technology. Many of these sensors are deployed in fluid streams, for example, in rapid sensing of trace quantities of chemical or biological species in gaseous or aqueous environments[1,2], or in high resolution, high bandwidth anemometry [3]. Their design needs to consider microcantilever bending caused by the flow. This work presents detailed experimental data on the flowinduced bending of micro-cantilevers, and a simple theoretical model for quantitatively predicting such behavior.

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