The Thin Plate Splines (TPS) theory is modified and employed in the reconstruction of 2D 1/2 unfolded micro-topographical surfaces. The modified TPS allows the reconstruction of MEMS structures based on sampled digital elevation model (DEM). The developed algorithms are implemented in MATLAB and applied to restore bad samples, enhance surface reconstruction, and compensate for surface irregularities for micromachining purposes. In addition, the restored surface reveals the scale components of the real surface (roughness, waviness and form). The irregularity of meso, micro and nano surfaces is then characterized into slope, curvature, strike, dip, azimuth and energy surfaces. It is concluded that the simplicity, differentiability of TPS and roughness components relaxation make the proposed theory advantageous on reconstruction and characterization of micro surfaces for a variety of applications.

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