This paper reports the development of MEMS metrology tools to characterize liquid and gaseous jets ejected from micro/nanofabricated nozzles. To date few highly local measurements have been made on micro/nanojets, due in part to the lack of characterization tools and techniques to investigate their characteristics. Atomic force microscope cantilevers are well-suited for interrogating these flows due to their high spatial and temporal resolution. In this work, cantilever sensors with either integrated heating elements or piezoresistive elements have been fabricated to measure thrust, velocity, and heat flux characteristics of micro/nanojets.

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