A full characterization of the mechanical parameters for vibrating MEMS sensors is required before integrating the mechanical and the electronic part. This is to verify that the main design specifications are fulfilled before sensors are available on the market. The main goal is to accurately establish the well-working devices in the shortest time. In this paper the electrical method based on the measurement of the GND current is used to satisfy this purpose. To check the validity of the achieved results through this method a comparison is done with those obtained through the widely used optical method based on vibration measurements through by means of a Laser Doppler Vibrometer (LDV).

N. Yazdi, F. Ayazi, K. Najafi. Micromachined inertial sensors. Proceedings of IEEE (August 1999).
J. Eichholz, J. Quenzer, O. Schwarzelbach, M. Weiß and B. Wenk. HDL-A-Model of a micromachined Tuning-Fork gyroscope. Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems.
P.J. Petersan, S.M. Anlage. Measurement of resonant frequencey and quality factor of microwave resonators: comparison of methods. Journal of applied physics (September 1998).
J. Burdess, A. Harris, D. Wood, R. Pitcher, D. Glennie. A system for the Dynamic Characterization of Microstructures. Journal of Microelectromechanical System (December 1997).
H. Kawai, M. Tamura, and K. Ohwada, Direct measurement of mechanical coupling in a microgyroscope using a two dimensional laser displacement meter. Proc. Transducers 99, 1999, pp. 1556–1559.
C. Rembe, R. Kant, R.S. Muller. Optical Measurement Methods to Study Dynamic Behaviour in MEMS. Proceedings-spie the international society for optical engineering
Y. Takahashi. MEMS Comb-Actuator Resonance Measurement Method Using the 2nd Harmonies of the GND Current. 10th Asian Test Symposium (ATS’01).
A.E. Duwel, J.P. Gormar, M. Weinstein, J.T. Borenstein, P. A. Ward. Quality Factors of MEMS Gyros and the Role of Thermoelastic Damping. 15th IEEE International Conference on Microelectromechanical System (MEMS). January 2002.
V. Anovazzi, S. Merlo, M. Norgia, B. Vigna, G. Spinola, S. Zerbini. Optical Detection of the Coriolis Force on a Silicon Micromachined Gyroscope. Journal of Microelectromechanical System (October 2003).
G. Spinola, S. Zerbini, and S. Gardella, “Patent,” European Patent Application Number EP01 830 277.8, April 27, 2001.
J. Bendat, A. Piersol. Random Data, Analysis and Measurement procedures.
D.J. Ewins. Modal Testing.
This content is only available via PDF.
You do not currently have access to this content.