This paper presents a novel latchable phase-change actuator that can potentially be used for flow valving and gating in portable lab-on-a-chip systems, where minimal energy consumption is required. The actuator exploits a low melting-point paraffin wax, whose solid-liquid phase changes allow the closing and opening of fluid flow through deformable microchannels. Flow switching is initiated by melting of paraffin, with an additional pneumatic pressure required for flow switching from open to closed state. After paraffin solidifies the switched state is subsequently maintained passively without further consumption of energy. The actuator can be fabricated from PDMS through the multilayer soft lithography technique. Testing results demonstrate that the actuator has a response time about 60-100 sec for flow switching, and can passively hold a microvalve closed under pressures up to 35 kPa.

1.
G.T.A. Kovacs, Micromachined Transducers Sourcebook, Boston: WCB McGraw-Hill, 1998.
2.
Selvaganapathy
 
P.
,
Carlen
 
E. T.
, and
Mastrangelo
 
C. H.
, “
Electrothermally Actuated Inline Microfluidic Valves
,”
Sensors and Actuators: A
,
104
(
2003
), pp.
275
282
.
3.
Carlen
 
E. T.
and
Mastrangelo
 
C. H.
, “
Surface Micromachined Paraffin-Actuated Microvalve
,”
Journal of Microelectromechanical Systems
,
11
(
2002
): pp.
408
420
.
4.
Klintberg
 
L.
,
Svedberg
 
M.
,
Nikolajeff
 
F.
, and
Thornell
 
G.
, “
Fabrication of a Paraffin Actuator Using Hot Embossing of Polycarbonate
,”
Sensors and Actuators: A
,
103
(
2003
), pp.
307
316
.
5.
Liu
 
R. H.
,
Bonanno
 
J.
,
Yang
 
J.
,
Lenigk
 
R.
, and
Grodzinski
 
P.
, “
Single-Use, Thermally Actuated Paraffin Valves for Microfluidic Applications
,”
Sensors and Actuators: B
,
98
(
2004
), pp.
328
336
.
6.
Pal
 
R.
,
Pal
 
R.
,
Yang
 
M.
,
Johnson
 
B. N.
,
Burke
 
D. T.
, and
Burns
 
M. A.
, “
Phase Change Microvalves for Integrated Devices
,”
Analytical Chemistry
,
76
(
2004
), pp.
3740
3748
.
7.
D. Armani, C. Liu, and N. Aluru, “Re-configurable Fluid Circuits by PDMS Elastomer Micromachining,” Proc. of the 12th IEEE International Conference on Micro Electro Mechanical Systems (MEMS ’99), Orland, FL, Jan. 17–21, 1999, pp. 222–227.
8.
Unger
 
M. A.
,
Chou
 
H. P
,
Thorsen
 
T.
,
Scherer
 
A.
, and
Quake
 
S. R.
, “
Monolithic Microfabricated Valves and Pumps by Multilayer Soft Lithography
,”
Science
,
288
(
2000
), pp.
113
116
.
9.
Jo
 
B. H.
,
Lerberghe
 
L. M. V.
,
Motsegood
 
J. N.
, and
Beebe
 
D. J.
, “
Three-dimensional Micro-channel Fabrication in Poly-dimethylsiloxane (PDMS) Elastomer
,”
Journal of Microelectromechanical Systems
,
9
(
2000
), pp.
76
81
This content is only available via PDF.
You do not currently have access to this content.