This paper details theoretical analyses and experimental characterization of high-frequency multi-stage micro pumps. The MEMS-fabricated micro pumps have been developed for use in a highly-integrated chemical monitoring system under development at the University of Michigan’s Wireless Integrated Micro-Systems center. Tests are reported on a 20x meso-scale 2-stage pump developed to validate the theoretical analyses. Detailed comparisons of the pump performance and unsteady pressure traces show that the theoretical analyses capture the main features of the flow in the pump. A MEMS-fabricated device has been developed and tested. The use of theoretical analyses for the design of the pump is described. This device produces A maximum flow of 1.1 ccm and a maximum pressure of 879 Pa.

Volume Subject Area:
Microelectromechanical Systems
Topics:
Micropumps, Pumps, Theoretical analysis, Microelectromechanical systems, Flow (Dynamics), Pressure, Design, Experimental characterization, Monitoring systems
1.
E. T. Zellers, et al., 2004, Hilton Head ’04, Hilton Head Island, SC, USA, pp. 61–66.
2.
Cleopatra Cabuz, William R. Herb, Eagen I. Cabuz, Son Thai Lu, 2001, “THE DUAL DIAPHRAGM PUMP,” IEEE, 0-7803-5998-4, p. 519–522.
3.
Astle A., A. Paige, L. P. Bernal, J. Munfakh, H. Kim, K. Najafi, 2002, “Analysis and design of multistage electrostatically-actuated micro-vacuum pumps,” Proceedings of 2002 ASME International Mechanical Engineering Congress, November 17–22, New Orleans, LA, Paper number IMECE2002-39308.
4.
Astle A., L. P. Bernal, H. Kim, K. Najafi, 2003, “Dynamic Modeling and design of a high Frequency Micro Vacuum Pump.” Proceedings of IMECE2003 2003 ASME International Mechanical Engineering Congress & Exposition Washington, DC, November 15–21.
5.
Hanseap Kim, Khalil Najafi, Aaron A. Astle, Luis P. Bernal, and Peter D. Washabaugh, 2005, “Fabrication and performance of a dual-electrode electrostatic peristaltic gas micropump,” 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences (μ TAS’05).
6.
Hanseup S. Kim and Khalil Najafi, 2003, “Wafer bonding using Parylene and wafer-level transfer of freestanding Parylene membranes.” 12th International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers ’03).
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