Experimentally measured temperature profiles along the micron-scale beam of a working thermal actuator are reported for the first time. Using a surface Raman scattering technique, temperature measurements are obtained in a noncontact fashion with submicron spatial resolution and to within an uncertainty of better than ±10 K. The experimental data are used to validate computational predictions of the actuator thermal performance with reasonable agreement between the data and predicted temperatures.

1.
Huang
Q. A.
and
Lee
N. K. S.
, “
Analysis and Design of Polysilicon Thermal Flexure Actuator
,”
J. Micromech. Microeng.
9
,
64
70
,
1999
.
2.
Hickey
R.
,
Kujath
M.
, and
Hubbard
T.
, “
Heat Transfer Analysis and Optimization of Two-Beam Microelectromechanical Thermal Actuators
,”
J. Vac. Sci. Technol. A
20
,
971
974
,
2002
.
3.
Hickey
R.
,
Sameoto
D.
,
Hubbard
T.
, and
Kujath
M.
, “
Time and Frequency Response of Two-Arm Micromachined Thermal Actuators
,”
J. Micromech. Microeng.
13
,
40
46
,
2003
.
4.
Li
L.
and
Uttamchandani
D.
, “
Modified Asymmetric Micro-Electrothermal Actuator: Analysis and Experimentation
,”
J. Micromech. Microeng.
14
,
1734
1741
.
2004
.
5.
Lott
C. D.
,
McLain
T. W.
,
Harb
J. N.
, and
Howell
L. L.
, “
Modeling and Thermal Behavior of a Surface Micromachined Linear-Displacement Thermomechanical Microactuator
,
Sensors and Actuators A
101
,
239
250
,
2002
.
6.
Baker, M.S., R.A. Plass, T.J. Headley, J.A. Walraven, “Final Report: Compliant Thermo-Mechanical MEMS Actuators LDRD #52553,” Sandia National Laboratories report no. SAND2OO4–6635, 2004.
7.
Sniegowski
J. J.
and
de Boer
M. P.
, “
IC-Compatible Polysilicon Surface Micromachining
,”
Ann. Rev. Materials Sci.
30
,
299
333
,
2000
.
8.
Balkanski
M.
,
Wallis
R. F.
, and
Haro
E.
, “
Anharmonic Effects in Light Scattering due to Optical Phonons in Silicon
,”
Phys. Rev. B
28
,
1928
1934
,
1983
.
9.
C. Kiltel, Introduction to Solid State Physics, 7th ed: Wiley, 1996.
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