LIGA (from German, LIthographie, Galvanoformung und Abformung) is one of the most viable manufacturing techniques for creating precise micro-mechanical components. Due to their monolithic construction, LIGA structures lack the most important contributor to energy dissipation; the joints. In shock and vibration environments, the low damping capacity can cause functional and structural failures. As a means of increasing the energy dissipation of LIGA structures, this paper experimentally investigates coupled fluid-structural dynamics of LIGA structures when submersed into fluids. The experiments are conducted by base-exciting a rectangular cross-section cantilever LIGA beam with a shaker, and measuring the response through a laser Doppler vibrometer. The paper also evaluates simple fluid dynamics models from the literature for their effectiveness in capturing the experimentally-observed behavior.

Volume Subject Area:
Microelectromechanical Systems
Topics:
Damping, Modeling, Energy dissipation, Fluids, Cantilevers, Construction, Dynamics (Mechanics), Fluid dynamics, Laser Doppler vibrometers, Manufacturing, Shock (Mechanics), Structural failures, Vibration
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