Micro hydrogen sensor with interdigitated electrodes and indium doped nanopolycrystalline SnO2 particles was fabricated and tested. Giant sensitivity as high as 105 with good repeatability and recovery was observed. The sensor showed an excellant selectivity of hydrogen (H2) sensing over helium (He).

Volume Subject Area:
Microelectromechanical Systems
Keywords:
MEMS, H2 sensor, doped SnO2, nanoparticles
Topics:
Hydrogen, Particulate matter, Semiconductors (Materials), Sensors, Temperature
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