In this paper, we present design, fabrication, and test results of a novel wavelength-selective MEMS switch for integrated optics. The device is based on switching of a ring resonator add-drop filter by use of an electrostatically-actuated MEMS bridge. We have demonstrated the wavelength-dependant switching capabilities of a prototype device; however, the residual stress in the bridge caused sagging of the bridge and high insertion loss to the optical output. Therefore, we are investigating the use of titanium nitride (TiN) for the MEMS bridge material. TiN has ideal characteristics both mechanically and electrically. It can also be annealed to lower the residual stress to almost zero. We have fabricated the MEMS bridge with TiN and done some preliminary experiments on the structure. The results show promise for the use of this material in our device, and more generally as a structural material. We have also designed closed-loop feedback control for precision positioning of the bridge. This enables this device to tune the selected wavelength over one full channel (30nm) for use as a tunable optical filter. The feedback scheme is based on using the bridge as one electrode of a capacitive sensor, and simulations indicate that the bridge position can be controlled to 2.5pm accuracy. Modifications of the device could also be used as a variable optical attenuator.
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ASME 2005 International Mechanical Engineering Congress and Exposition
November 5–11, 2005
Orlando, Florida, USA
Conference Sponsors:
- Microelectromechanical Systems Division
ISBN:
0-7918-4224-X
PROCEEDINGS PAPER
Microelectromechanical Wavelength-Selective Switching for Integrated Optics
Laura Waller,
Laura Waller
Massachusetts Institute of Technology
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Satoshi Takahashi,
Satoshi Takahashi
Massachusetts Institute of Technology
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Gregory N. Nielson,
Gregory N. Nielson
Massachusetts Institute of Technology
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Dilan Seneviratne,
Dilan Seneviratne
Massachusetts Institute of Technology
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Harry Tuller,
Harry Tuller
Massachusetts Institute of Technology
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George Barbastathis
George Barbastathis
Massachusetts Institute of Technology
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Laura Waller
Massachusetts Institute of Technology
Satoshi Takahashi
Massachusetts Institute of Technology
Gregory N. Nielson
Massachusetts Institute of Technology
Dilan Seneviratne
Massachusetts Institute of Technology
Harry Tuller
Massachusetts Institute of Technology
George Barbastathis
Massachusetts Institute of Technology
Paper No:
IMECE2005-81773, pp. 525-529; 5 pages
Published Online:
February 5, 2008
Citation
Waller, L, Takahashi, S, Nielson, GN, Seneviratne, D, Tuller, H, & Barbastathis, G. "Microelectromechanical Wavelength-Selective Switching for Integrated Optics." Proceedings of the ASME 2005 International Mechanical Engineering Congress and Exposition. Microelectromechanical Systems. Orlando, Florida, USA. November 5–11, 2005. pp. 525-529. ASME. https://doi.org/10.1115/IMECE2005-81773
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