A new design optimization methodology for Micro-Electro-Mechanical Systems (MEMS) application is presented. The optimization approach considers minimization of several uncertainty factors on the overall system performance while satisfying target requirements specified in the form of constraints on micro-fabrication processes and materials system. The design process is modeled as a multi-level hierarchical optimal design problem. The design problem is decomposed into two analysis systems; uncertainty effects analysis and performance sensitivity analysis. Each analysis system can be partitioned into several subsystems according to the different functions they perform. The entire problem has been treated as a multi-disciplinary design optimization (MDO) for maximum robustness and performance achievement. In this study, the analysis results are provided as optimized device geometry parameters for the example of the selected micro accelerometer device.
System Hierarchy Optimization Method for MEMS Applications
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Liu, N, & Manoochehri, S. "System Hierarchy Optimization Method for MEMS Applications." Proceedings of the ASME 2005 International Mechanical Engineering Congress and Exposition. Microelectromechanical Systems. Orlando, Florida, USA. November 5–11, 2005. pp. 497-505. ASME. https://doi.org/10.1115/IMECE2005-81653
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