This paper discusses the design and control of massively parallel microcantilever arrays with multi-walled carbon nanotube tips. The integrated system can make a powerful tool for imaging, sensing and 3D nanomanipulation of nanoparticles and biological samples. The microcantilever has a multi-walled carbon nanotube tip and four additional carbon nanotubes for 3D fine manipulation by electrostatic forces. The reflected light from the deflected microcantilever is collected by a position sensitive photodetector and fast readout is achieved by a time-multiplexing scheme. A distributed parameter system model has been developed to study its dynamic behavior. Simulations have been performed for the carbon nanotube tipped microcantilevers of three different dimensions to investigate their open-loop and closed-loop performances. It is shown via simulations that with carefully selected dimensions they can demonstrate an excellent capability for nanomanipulation of samples and tapping mode operation for imaging under a simple PID controller.

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