Finite element analysis (FEA) of piezoelectrically actuated micropump was carried. The actuator was designed using a PZT (Lead zirconate titanate) layer coated on a flexural PVDF (Polyvinylede fluoride) membrane. The flow of liquid was controlled by the cantilever valves at both the inlet and outlet. The flow rate of the pump was estimated using the stroke volume due to the deflection of diaphragm. The optimum flow characteristics were estimated using the stroke volume as a function of frequency of power supply. The performance of the pump with and without the effect of valve on flow rate was also studied. The operation of the PZT actuator at higher frequencies would lead to self-heating of the material. This limitation on temperature was studied and the ways to reduce the self-heating were verified.

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