Microscale cooling to date relies largely on passive on-chip cooling in order to move heat from hot spots to alternate sites. Such passive cooling devices include capillary pump loops (CPL), heat pipes, and thermosiphons. Recent developments for active cooling systems include thermal electric coolers (TECs) for heat removal. This paper focuses on the design of an active microscale closed loop cooling system that uses a Rankine vapor compression cycle cooling system. In this design, a rotary compressor will generate the high pressure required for efficient cooling and will circulate the working fluid to move heat away from chip level hot spots to the ambient. The rotary compressor will leverage technology gained from the Rotary Engine Power System (REPS) program at the UC Berkeley, most specifically the 367 mm3 displacement platform. The advantage of a Wankel (Maillard) compressor is that it provides six compression strokes per revolution rather than a single compression stroke common to other popular compressors such as the rolling piston. The current Wankel compressor design will achieve a theoretical compression ratio of 8:1. The ARCTIC (A Rotary Compressor Thermally Insulated μCooler) system will be a microscale hybrid system consisting of some microfabricated (or MEMS) components including microchannels, in plane MEMS valves, and potentially MEMS temperature, pressure and flow sensors integrated with mesoscale, traditionally machined steel components, including the compressor itself. The system is designed to remove between 25-35 W of heat at 1000 rpm using R-134a but the system is easily scaleable through a speed increase or decrease of the compressor. Further, the current compressor design has a theoretical coefficient of performance (C.O.P.) of approximately 2, a significant improvement over comparable TECs with C.O.P.s of approximately .05-.1. Finally, a thermal circuit analysis determines that the time constant to achieve refrigeration temperature in 12 seconds is possible.

1.
Suman
B.
,
Hoda
N.
, “
Effect of Variations in Thermophysical Properties and Design Parameters on the Performance of a V-shaped Micro Grooved Heal Pipe
,”
International Journal of Heat and Mass Transfer
, vol.
48
, pp.
2090
2090
,
2005
.
2.
Pettigrew, K.I., 2002, “MEMS Based Capillary Pumped Loops for Integral Thermal Management,” PhD Thesis. University of California at Berkeley.
3.
Yang, R., G. Chen, J. Snyder, J-P. Fleurial, “Multistage Thermoelectric Micro Coolers,” 8th Intersociety Conference on Thermal and Thermommechanical phenomena in Electronic Systems, San Diego, May 30-Jun 1, 2002.
4.
Garimella, Suresh V., V. Singhal, “Single-Phase Flow and Heat Transport in Microchannel Heat Sinks,” First International Conference on Microchannels and Minichannels, Rochester, April 24–25, 2003.
5.
Jong
S.
, “
How Difficult is it to Make a Micro Refrigerator
,”
International Journal of Refrigeration
,
27
, pp.
309
313
.
6.
Fu, K., A. Knobloch, F. Martinez, D.C. Walther, C. Fernandez-Pello, A.P. Pisano, D. Liepmann, K. Miyaska, and K. Maruta, “Design and Experimental Results of Small-Scale Rotary Engines,” IMECE/MEMS-23924, Proc. ASME 2001 International Mechanical Engineering Congress and Exposition (IMECE), New York, November 11–10, 2001.
7.
Dossat, Roy J., 1997, Principles of Refrigeration, Prentice Hall, Upper Saddle River.
8.
Yamamoto, K, 1981, Rotary Engine, Toyo Kogyo Co, Hiroshima.
9.
Talbot, N.H., 1999, “Polysilicon Micromolding of Closed-flow Passages for the Fabrication of Multifunctional Microneedles,” PhD Thesis, University of California at Berkeley.
10.
Martinez, F.C., N. Chen, M. Wasilik, A.P. Pisano, “Optimized Ultra-DRIE for the MEMS Rotary Engine Power System,” EMN04, Paris, October 20–21, 2004.
11.
Sun, C.-L. “Dynamic Modeling of a Thermally-Driven Micro Diffuser Pump,” Proc. ASME 2003 International Mechanical Engineering Congress and Exposition (IMECE), Washington D.C, November 16–21, 2003.
12.
Olsson
A.
,
Stemme
G.
,
Stemme
E.
, “
Numerical and Experimental Studies of Flat-Walled Diffuser Elements for Valve-Less Micropumps
Sensors and Actuators
, vol.
84
, issue
1
, pp.
165
165
,
2000
.
13.
Incropera, F. P., D.P. DeWitt, 1996, Introduction to Heat Transfrer, John Wiley & Sons, New York.
14.
Senturia, S.D., 2001, Microsystem Design, Kluwer Academic Publishers, Boston.
15.
Lou, Z.D., “A Dynamic Model of Automotive Air Conditioning Systems” Proc. 2005 SAE World Congress, Detroit, April 11–14, 2005.
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