When significantly displacing a proof mass, the nonlinear hardening characteristic of the supporting beams becomes visible. Thus, the resonance peak of the structure is no longer vertical but bends towards the higher frequencies. This property is useful to easily synchronise sense and drive resonances thus increasing the sensibility of the MEMS gyroscope. Through a test structure designed to investigate the high deformation range of the supporting beams, its nonlinear vibrations were investigated both experimentally and numerically. It is shown that a simple nonlinear lumped parameter model could be sufficient to schematise the system and that a semi-analytical integration method allows to quickly determine both stable and unstable branches of the system’s dynamic response and to design the supporting structure.

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