Thin films (0.85μm, 3μm) of Ta2O5 deposited on Si and SiO2 were heated to 900°C. Their reflectance in the infrared was measured using an FTIR (Fourier Transform Infrared Spectrometer) equipped with a multiple angle reflectometer before and after exposure to high temperature. An interfacial layer (TaSixOy) formed by the diffusion of Si from the substrate into the deposited film was observed using Auger depth profiling, and the effect of this interfacial layer on the reflectance was measured. Using a least squares optimization technique coupled with an optical admittance algorithm, the multiple angle reflectance data was used to calculate the optical constants of the as deposited Ta2O5 film, crystalline Ta2O5, and the interfacial layer in the 1.6μm to 10μm range. The interfacial layer formed due to exposure to high temperature was found to be more absorptive than the crystalline Ta2O5.

1.
Miesse
Craig M.
,
Masel
Richard I.
,
Jensen
Craig D.
,
Shannon
Mark A.
,
Short
Mark
,
2004
Submillimeterscale combustion
,”
AIChe Journal
,
50
(
12
), pp.
3206
31214
.
2.
Fernandez-Pello
A. C.
,
2002
, “
Micropower Generation Using Combustion: Issues and Approaches
,”
Proc. Combust. Inst.
,
29
, pp.
883
883
.
3.
Warnatz, J., U. Maas, R. W. Dribble, Combustion, Springer, 3rd edition.
4.
C. Chaneliere, J.L. Autran, R.A.B. Devine, B. Balland, 1998, “Tantalum pentoxide (Ta2O5) thin films for advanced dielectric applications,” Mater. Sci. and Eng., pp. 269–322.
5.
Obata, Yuji; Hashimoto, Naotaka, 2002, “Deposition of multilayer IR reflective layers with controlled thickness on lamp bulbs,” Jpn. Kokai Tokkyo Koho.
6.
Franke
Eva
,
Trimble
C. L.
,
Devries
M. J.
,
Woollam
J. A.
,
Schubert
M.
,
Frost
F.
,
2000
, “
Dielectric function of amorphous tantalum oxide from the far infrared to the deep ultraviolet spectral region measured by spectroscopic ellipsometry
,”
Journal of Applied Physics
,
88
(
9
), pp.
5166
5174
.
7.
Atanassova
E.
,
Paskaleva
A.
,
2002
, “
Breakdown fields and conduction mechanisms in thin Ta2O5 layers on Si for high density DRAMs
,”
Microelectronics Reliability
42
,
157
173
.
8.
Zhang
J. Y.
, and
Boyd
I. W.
,
2000
, “
Formation of silicon dioxide layers during UV annealing of tantalum pentoxide
,”
Applied Surface Science
168
,
312
315
.
9.
Incropera, F.P., DeWitt, D.P., 1990, Fundamentals of heat and mass transfer, 3rd Edition, John Wiley and Sons.
10.
Macleod, H.A., 1969, Thin-Film optical filters, Elsevier.
11.
Ford
J. N.
,
Tang
K
,
Buckius
R. O.
,
1995
, “
Fourier transform infrared system measurements of the bidirectional reflectivity of diffuse and grooved surfaces
,”
Journal of Heat Transfer
,
117
, pp.
955
962
.
12.
Paul Kawka, 2000, “An experimental theoretical and numerical investigation of directional scattering from configured surfaces,” M.S. Thesis, Univ. of Illinois.
13.
Born, M., and E. Wolf, 1970, Principles of optics, Pergamon Press, 4th Edition.
14.
Abeles
,
1963
, “
Methods for determining optical parameters of thin films
,”
Progress in Optics
,
2
,
251
288
.
15.
Hopfe
V
,
Bussemer
P.
,
Rlchter
E.
, and
Klobes
P.
,
1992
, “
p- and s- polarized FTIR Reflectance spectroscopy at oblique incidence by Kramers-Kronig transformation
,”
J. Phys. D: Appl. Phys.
25
,
288
294
.
16.
S. Klein, F. Alvarado, 1991, “Engineering Equation Solver,” Madison, F-Chart Software.
17.
Davidon
W.
,
1959
Variable metric method for minimization
,”
SIAM J. Opt.
,
1
(
1
),
1
17
.
18.
Babu
S. V.
,
David
M.
, and
Patel
R. C.
,
1991
, “
Two-step regression procedure for the optical characterization of thin films
,”
Applied Optics
,
30
(
7
), pp.
839
846
.
19.
Poitras
D.
, and
Martinu
L.
,
2000
, “
Interphase in plasma-deposited films on plastics: effect on the spectral properties of optical filters
,”
Applied Optics
,
39
(
7
), pp.
1168
1173
.
20.
Borgogno
J. P.
,
Lazarides
B.
, and
Pelletier
E.
,
1982
, “
Automatic determination of the optical constant of inhomogeneous thin films
,”
Applied Optics
,
21
(
22
), pp.
4020
4029
.
21.
Oehrlein
G. S.
,
d’Heurle
F. M.
, and
Reisman
A.
,
1984
, “
Some properties of crystallized tantalum pentoxide thin films on silicon
J. Appl. Phys.
,
55
,
3715
3715
.
22.
Palik, 1992, Handbook of optical constants, Academic Press.
23.
Brewster, Q., 1991, Thermal radiative transfer and properties, Wiley, 1991.
This content is only available via PDF.
You do not currently have access to this content.