This work reports on the development of a scanning hot probe technique for the measurement of thermoelectric properties of thin-films. In this method a resistively heated thermal probe of an Atomic Force Microscope (AFM) is brought in contact with the sample surface giving rise to a temperature gradient and a Seebeck voltage in the specimen. The average temperature rise of the probe is determined from the change in its electrical resistance. The heat transfer rate between the probe and the sample is estimated using a heat transfer model that takes into account the major heat transfer mechanisms in the system. The thermal conductivity is determined from the measured thermal resistance of the film. The Seebeck coefficient value is calculated using the measured temperature drop and the Seebeck voltage in the plane of the sample. The method is calibrated on glass and silicon substrates. Preliminary experimental results are presented for a thermoelectric film composed of randomly aligned Bi2Te3 nanowires deposited on a glass substrate.

1.
Goldsmid, 1964, Thermoelectric Refrigeration, Plenum, New York.
2.
Venkatasubramanian
R.
,
Siivola
E.
,
Colpitts
T.
, and
O’Quinn
B.
,
2001
Thin-film thermoelectric devices with high-room temperature figures of merit
,”
Nature
413
,
597
597
.
3.
Harman
T. C.
;
Taylor
P. J.
,
Walsh
M. P.
, and
LaForge
B. E.
,
2002
, “
Quantum dot superlattice thermoelectric materials and devices
,”
Science
297
,
2229
2229
.
4.
Chen
G.
,
Dresselhaus
M. S.
,
Dresselhauss
G.
,
Fleurial
J. P.
, and
Caillat
T.
,
2003
, “
Recent developments in thermoelectric materials
,”
International Materials Reviews
48
,
45
45
.
5.
Harman
T. C.
,
Taylor
P. J.
,
Spears
D. L.
, and
Walsh
M. P.
,
2000
, “
Thermoelectric quantum dot superlattices with high ZT
,”
Journal of Electronic Materials
29
, pp.
L1–L4
L1–L4
.
6.
Borca-Tasciuc, T., Liu, W. L., Liu, J. L., Wang, K. L., and Chen, G., 2001, “In-plane thermoelectric properties characterization of a Si/Ge Superlattice using a microfabricated test structure,” 2001 National Heat Transfer Conference, June 10–12, Anaheim, CA, CD-ROM, archival # NHTC2001-20097.
7.
Kim
P.
,
Shi
L.
,
Majumdar
A.
, and
McEuen
P. L.
,
2001
, “
Thermal transport measurements of individual multiwalled nanotubes
,”
Physics Review Letters
87
,
215502
215502
.
8.
Yang
B.
,
Liu
W. L.
,
Liu
J. L.
,
Wang
K. L.
, and
Chen
G.
,
2002
, “
Anisotropic thermoelectric properties of superlattices
,”
Applied Physics Letters
81
,
3588
3588
.
9.
Shi
L.
and
Majumdar
A.
,
2002
, “
Thermal transport mechanisms at nanoscale point contacts
,”
Journal of Heat Transfer
124
,
329
329
.
10.
Williams
C. C.
, and
Wickramasinghe
H. K.
,
1986
, “
Scanning thermal profiler
,”
Applied Physics Letters
49
,
1587
1587
.
11.
Lefe`vre
S.
,
Volz
S.
,
Saulnier
J.-B.
,
Fuentes
C.
, and
Trannoy
N.
,
2003
, “
Thermal conductivity calibration for hot wire based dc scanning thermal microscopy
,”
Review of Scientific Instruments
74
,
2418
2418
.
12.
Varesi
J.
and
Majumdar
A.
,
1998
, “
Scanning joule expansion microscopy at nanometer scales
,”
Applied Physics Letters
72
,
37
37
.
13.
Goodson
K. E.
and
Asheghi
M.
,
1997
, “
Near-field optical thermometry
,”
Microscale Thermophysical Engineering
1
,
225
225
.
14.
Fletcher
D. A.
,
Crozier
K. B.
,
Quate
C. F.
,
Kino
G. S.
,
Goodson
K. E.
,
Simanovski
D.
, and
Palanker
D. V.
,
2000
, “
Near-field infrared imaging with a microfabricated solid immersion lens
,”
Applied Physics Letters
77
,
2109
2109
.
15.
Incropera, F. P. and DeWitt, D. P., 1996, Fundamentals of heat and mass transfer, p. 502, John Wiley & Sons.
16.
Borca-Tasciuc T. et al., unpublished.
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