In this study we report the design, fabrication and testing of a surface micro-machined array of temperature sensors for studying micro-scale features in film boiling. The fabrication steps involved deposition by metal evaporation and “lift-off” process. The thermocouple junction sizes were less than 50μm wide and 100-250nm thick. Wire bonding techniques were explored for packaging. An apparatus for boiling experiments was constructed to test the micro-machined temperature sensors. The apparatus consists of a viewing chamber containing a metal block (copper block covered with a steel jacket) in which cartridge heaters and thermocouples are embedded. A silicon wafer with the surface micro-machined thermocouple arrays was clamped on top of this metal block. Surface temperatures were measured, during boiling experiments with PF-5060 as the working liquid, using the surface micro-machined thermocouple. Since the micro-machined thermocouples have very low characteristic time constant, temperature measurements can be performed with better accuracy, spatial resolution and temporal precision, than standard thermocouples.

1.
Henry
Robert E.
, “
A correlation for minimum film boiling temperature
.”
AICHE Sym. Series
, No. 138, Vol.
70
, Page
81
90
.
2.
Banerjee
D.
and
Dhir
V. K.
, “
Study of subcooled film boiling on a horizontal disc: Part 1 Analysis
.”
Journal of Heat Transfer
Vol.
123
, Page
271
284
.
3.
Banerjee
D.
and
Dhir
V. K.
, “
Study of subcooled film boiling on a horizontal disc: Part 2 Experiments
.”
Journal of Heat Transfer
Vol.
123
, Page
285
293
4.
Banerjee, D., Son, G. and Dhir, V.K., “Conjugate Thermal and Hydrodynamic analysis of saturated film boiling from a horizontal surface.” ASME HTD Vol. 334, Part 3, pp. 57–64, 1996.
5.
Kovacs, Gregory T. A., “ Micromachined transducers: Sourcebook.” WCB/McGraw Hill.
6.
Hohmann
C.
and
Stephan
P.
, “
Microscale temperature measurement at an evaporating liquid meniscus
.”
Experimental Thermal and Fluid Science
26
, pp.
157
162
,
2002
7.
Park, Jong-Jin and Taya, Minoru, “Design of Micro-Arrayed thin film thermocouples (TFTC).” Proceedings of IPACK2003-35040
8.
Kreider
Kenneth G.
and
Gillen
Greg
, “
High temperature materials for thin-film thermocouples on silicon wafers
.”
Thin Solid Films
376
, pp.
32
37
,
2000
.
9.
Kreider
Kenneth G.
and
DiMeo
Frank
, “
Platinum/palladium thin-film thermocouples for temperature measurements on silicon wafers
.”
Sensors and Actuators
A69
, pp.
48
52
,
1998
.
10.
Debey
D.
,
Bluhm
R.
,
Habets
N.
and
Kurz
H.
, “
Fabrication of planar thermocouples for real-time measurements of temperature profiles in polymer melts
.”
Sensors and Actuators
A58
, pp.
179
184
,
1997
.
This content is only available via PDF.
You do not currently have access to this content.