Laser material processing demonstrated its significance in many areas such as microelectronics, data storage, photonics and nanotechnology, since versatile laser sources provide flexible and unique energy source for precise control of material processing. With current laser technology, a short wavelength down to X-ray range and a short pulse duration down to femtosecond range can be achieved. The extreme conditions created by laser irradiation have provided strong impact on material research. To achieve nanoscale laser material machining and processing, we need to overcome the diffraction limit of the laser wavelengths. Recently, different approaches have been explored to overcome the diffraction limit and to achieve feature sizes down to 10 nm order, way beyond the diffraction limits. This paper will provide an overview in the areas of laser-based nanoscale machining and processing, including the author’s own research experience on laser-assisted scanning probe microscope, superfocusing by optical resonance in spherical particles, laser nanoimprinting, laser synthesis of quantum dots, laser annealing of ultrashow pn junctions, nanometer-order film thickness detection using rotational Raman spectroscopy, and laser cleaning of nanoparticles.

1.
Quate
CF
, “
Scanning Probes as a Lithography Tool for Nanostructures
,”
Surface Science
,
386
,
259
264
(
1997
)
2.
Grafstro¨m
S
, “
Photoassisted Scanning Tunneling Microscopy
,”
J. Appl. Phys.
,
91
,
1717
1753
(
2002
)
3.
Jersch
J
,
Demming
F
,
Dickmann
K
, “
Nanostructuring with Laser Radiation in the Nearfield of a Tip from a Scanning Force Microscope
,”
Appl. Phys.
A64
,
29
32
(
1997
)
4.
Jersch
J
,
Demming
F
,
Fedotov
I
,
Dickmann
K
, “
Time-resolved Current Response of a Nanosecond Laser Pulse Illuminated STM Tip
,”
Appl. Phys.
A68
,
637
641
(
1999
)
5.
Huber
R
,
Koch
M
,
Feldmann
J
, “
Laser-induced Thermal Expansion of a Scanning Tunneling Microscope Tip Measured with an Atomic Force Microscope Cantilever
,”
Appl. Phys. Lett.
,
73
,
2521
2523
(
1998
)
6.
Boneberg
J
,
Mu¨nzer
HJ
,
Tresp
M
,
Ochmann
M
,
Leiderer
P
, “
The Mechanism of Nanostructring upon Nanosecond Laser Irradiation of a STM Tip
,”
Appl. Phys.
A67
,
381
384
(
1998
)
7.
Boneberg
J
,
Tresp
M
,
Ochmann
M
,
Mu¨nzer
HJ
,
Leiderer
P
, “
Time-resolved Measurements of the Response of a STM Tip upon Illumination with a Nanosecond Laser Pulse
,”
Appl. Phys.
A66
,
615
619
(
1998
)
8.
Lu
YF
,
Mai
ZH
,
Zheng
YW
,
Song
WD
,
Chim
WK
, “
Nanostructure fabrication using pulsed lasers in combination with a scanning tunneling microscope: mechanism investigation
,”
Appl. Phys. Lett.
,
76
(
9
),
1200
1202
(
2000
)
9.
Lu
YF
,
Hu
B
,
Mai
ZH
,
Wang
WJ
,
Chim
WK
,
Chong
TC
, “
Laser-SPM Based Nanoprocessing of Electronics Materials
,”
Japan J. Appl. Phys. Part
1
,
40(6B)
,
4395
4398
(
2001
)
10.
Jersch
J
,
Dickmann
K
, “
Nanostructure Fabrication Using Laser Field Enhancement in the Near Field of a Scanning Tunneling Microscope Tip
,”
Appl. Phys. Lett.
68
,
868
870
(
1996
)
11.
Jersch
J
,
Demming
F
,
Hildenhagen
LJ
,
Dickmann
K
, “
Field Enhancement of Optical Radiation in the Near Field of Scanning Probe Microscope Tip
,”
Appl. Phys.
A66
,
29
34
(
1998
)
12.
Lu
YF
,
Mai
ZH
,
Chim
WK
, “
Electromagnetic calculations of the near field of a tip under polarized laser irradiation
,”
Jpn. J. Appl. Phys.
, Part 1,
38
(
10
),
5910
5915
(
1999
)
13.
Lu
YF
,
Mai
ZH
,
Qiu
G
,
Chim
WK
, “
Laser-induced nanooxidation on hydrogen-passivated Ge (100) surfaces under a scanning tunneling microscope tip
,”
Appl. Phys. Lett.
,
75
(
16
),
2359
2361
(
1999
)
14.
Lu
YF
,
Mai
ZH
,
Song
WD
,
Chim
WK
, “
Scanning tunneling microscopy study and modification of hydrogen-passivated Ge (100) surfaces
,”
Appl. Phys.
A70
(
4
),
403
406
(
2000
)
15.
B Hu, YF Lu, ZH Mai, WD Song, WK Chim, “Kinetic Study of Nanofabrication on Gold Films by Atomic Force Microscope Tips under Laser Irradiation,” First International Symposium on Laser Precision Microfabrication, 232–235(2000)
16.
Mai
ZH
,
Lu
YF
,
Huang
SM
,
Chim
WK
,
Pan
JS
, “
Mechanism of Laser-induced Nanomodification on Hydrogen-passivated Si(100) Surfaces Underneath the Tip of a Scanning Tunneling Microscope
,”
J. Vac. Sci. Technol.
B18
,
1853
1857
(
2000
)
17.
Mai
ZH
,
Lu
YF
,
Song
WD
,
Chim
WK
, “
Nano-modification on Hydrogen-passivated Si Surfaces by a Laser-assisted Scanning Tunneling Microscope Operating in Air
,”
Appl. Surf. Sci.
,
154–155
,
360
364
(
2000
)
18.
A Chimmalgi, T Choi, CP Grigoropoulos, “Nanostructuring with Scanning Probe Microscope Tip Irradiated with Femtosecond Laser,” ASME International Mechanical Engineering Congress and Exposition, New Orleans, LA(2002)
19.
Huang
SM
,
Hong
MH
,
Lu
YF
,
Luky`anchuk
BS
,
Song
WD
,
Chong
TC
, “
Pulsed-laser Assisted Nanopatterning of Metallic Layers Combined with Atomic Force Microscopy
,”
J. Appl. Phys.
,
91
,
3268
3274
(
2002
)
20.
Lyubinetsky
I
,
Dohna´lek
Z
,
Ukraintsev
VA
,
Yates
JT
, “
Transient Tunneling Current in Laser-assisted Scanning Tunneling Microscopy
,”
J. Appl. Phys.
,
82
,
4115
4117
(
1997
)
21.
Demming
F
,
Dickmann
K
,
Jersch
J
, “
Wide Bandwidth Transimpedance Preamplifier for a Scanning Tunneling Microscope
,”
Review of Scientific Instruments
,
69
,
2406
2408
(
1998
)
22.
Jersch
J
,
Demming
F
,
Fedotov
I
,
Dickmann
K
, “
Wide-band Low-noise Tunnel Current Measurement in Laser Assisted Experiments
,”
Review of Scientific Instruments
,
70
,
3173
3176
(
1999
)
23.
Dohna´lek
Z
,
Lyubinetsky
I
,
Yates
JT
, “
Laser Pulse Desorption under Scanning Tunneling Microscope Tip-Cl Removal from Single Site on Si(100)
,”
J. Vac. Sci. Technol.
A15
,
1488
1492
(
1997
)
24.
Ukraintsev
VA
,
Yates
JT
, “
Nanosecond Laser Induced Single Atom Deposition with Nanometer Spatial Resolution using a STM
,”
J. Appl. Phys.
,
80
,
2561
2571
(
1996
)
25.
Yau
ST
,
Saltz
D
,
Nayfeh
MH
, “
Laser-assisted Deposition of Nanometer Structures Using a Scanning Tunneling Microscope
,”
Appl. Phys. Lett.
,
57
,
2913
2915
(
1990
)
26.
Yau
ST
,
Saltz
D
,
Nayfeh
MH
, “
Scanning Tunneling Microscope-Laser Fabrication of Nanostructures
,”
J. Vac. Sci. Technol.
,
B9
,
1371
1375
(
1991
)
27.
Bobbert
P. A.
and
Vlieger
J.
,
Physica A
,
137
,
209
209
(
1986
).
28.
The Scattering of Light, M. Kerker (Academic Press, New York & London, 1969).
29.
Lu
Y. F.
,
Zhang
L.
,
Song
W. D.
,
Zheng
Y. W.
, and
Luk’yanchuk
B. S.
,
JETP Lett.
,
72
(
9
),
457
457
(
2000
).
30.
Bobbert
P. A.
,
Vlieger
J.
, and
Greef
R.
,
Physica A
,
137
,
243
243
(
1986
).
31.
B. S. Luk’yanchuk, Y. W. Zheng, and Y. F. Lu, Proc. SPIE, 4065 (2000).
32.
Mathematica, 4th Edition, S. Wolfram (Wolfram Media / Cambridge University Press 1999).
33.
Kane
D. M.
and
Halfpenny
D. R.
,
J. Appl. Phys.
87
,
4548
4548
(
2000
).
34.
Huang
S. M.
,
Hong
M. H.
,
Lukyanchuk
B. S.
,
Zheng
Y. W.
,
Song
W. D.
,
Lu
Y. F.
, and
Chong
T. C.
,
J. Appl. Phys.
92
,
2495
2495
(
2002
).
35.
Ng
V.
,
Lee
Y. V.
,
Chen
B. T.
and
Adeyeye
A. O.
,
Nanotechnology
13
,
554
554
(
2002
).
36.
Hulteen
J. C.
and
Van Duyne
R P.
,
J. Vac. Sci. Technol.
A
3
,
1553
1553
(
1995
).
37.
L. Y. Chen, in Pulsed Laser Deposition of Thin Films, edited by D. B. Chrisey and G. K. Hubler (John Wiley & Sons, New York, 1994), p. 186.
38.
Geohegan
D. B.
,
Puretzky
A. A.
,
Duscher
G.
, and
Pennycook
S. J.
,
Appl. Phys. Lett.
72
,
2987
2987
(
1998
).
39.
Suzuki
N.
,
Makino
T.
,
Yamada
Y.
,
Yoshida
T.
, and
Onari
S.
,
Appl. Phys. Lett.
76
,
1389
1389
(
2000
).
40.
Wood
R. F.
,
Chen
K. R.
,
Leboeuf
J. N.
,
Puretzky
A. A.
, and
Geohegan
D. B.
,
Phys. Rev. Lett.
79
,
1571
1571
(
1997
).
41.
Movtchan
I. A.
,
Dreyfus
R. W.
,
Marine
W.
,
Sentis
M.
,
Autric
M.
,
Le Lay
G.
, and
Merk
N.
,
Thin Solid Films
255
,
286
286
(
1995
).
42.
R. Murto, K. Jones, M. Rendon and S. Talwar, Proc. of Ion Impla. Tech., 155 (2000).
43.
Chong
Y. F.
,
Pey
K. L.
,
Wee
A. T. S.
,
See
A.
,
Chan
L.
,
Lu
Y. F.
,
Song
W. D.
and
Chua
L. H.
,
Appl. Phys. Lett.
76
,
3197
3197
(
2000
).
44.
S. B. Felch, D. F. Downey, E. A. Arevalo, S. Talwar, C. Gelatos and Y. Wang, Proc. of Ion Impla. Tech., 197 (2000).
45.
B. Yu, Y. Wang, H. Wang, Q. Xiang, C. Riccobene, S. Talwar and M. Lin, Tech. Dig. Int. Electron Devices Meet., 509 (1999).
46.
S. Talwar, G. Verma and K. H. Weiner, Proc. of Ion Impla. Tech., 74 (1998).
This content is only available via PDF.
You do not currently have access to this content.