A metal sacrificial method has been investigated for creation of microchannels by galvanic corrosion in a metal multilayer. To achieve the fastest sacrificial metal combination, different metals and the corresponding etchants are chosen. Channels from 50 μm to 1 μm wide, 0.2 μm high, and 1500 μm long, as well as the channel array is fabricated, using Cr/Cu galvanic metal couple as sacrificial material. The relationship between the etching front vs. the etching time, and the relationship of the etch rate vs. channel width is measured and compared with the etching performance of the single metal. The measurement shows there is approximately 10 times faster etching in the galvanic coupled metals than that in the single metal. SEM images of the channels and channel array made by this method are presented. This method is compatible with the conventional VLSI process, and has the potential for fabricating microchannels with submicron or even nanometer cross section.

Volume Subject Area:
Fluids Engineering
Keywords:
microchannel, sacrificial, microfluidics, Microelectromechanical systems
Topics:
Electrolytic corrosion, Microchannels
1.
Kamper, K.-P., Ehrfeld, W., Dopper, J., Hessel, V., Lehr, H., Lowe, H., Richter, T., and Wolf, A., Jan.26–30, 1997, “Microfluidic components for biological and chemical microreactors,” IEEE MEMS ’97, Nagoya, Japan, pp. 338–343.
2.
Beach
R.
,
Benett
W. J.
,
Freitas
B. L.
,
Mundinger
D.
,
Comaskey
B. J.
,
Solarz
R. W.
, and
Emanuel
M. A.
, April
1992
, “
Modular micro-channel cooled heatsinks for high average power laser diode arrays
,”
Quantum Electronics, IEEE Journal of
, Volume
28
, Issue 4, pp.
966
–
976
3.
Wang, Xuan-Qi, Lion, Qiao, Tai, Yu-Chongi, 1999, “A Parylene Micro Check Valve,” IEEE 1999 Int. Micro Electro Mechanical Systems Conference (MEMS’99).
4.
Field, Leslie A., White, Richard M., and Pisano, Albert P., June 1991, “Fluid-powered rotary gears and micro-flow channels,” Transducers ’91: 6th International Conference on Solid-State Sensors and Actuators, Digest of Technical Papers, San Francisco, California
5.
Yun
Kwang-Seok
,
Cho
Il-Joo
,
Bu
Jong-Uk
,
Kim
Chang-Jin (CJ)
, and
Yoon
Euisik
, Oct
2002
,
A Surface-Tension Driven Micropump for Low-Voltage and Low-Power Operations
,
Journal of Microelectromechanical Systems
, Vol.
11
, No.
5
, pp.
454
–
461
6.
Rasmussen
Angela
,
Gaitan
Michael
,
Locascio
Laurie E.
, and
Zaghloul
Mona E.
, Jun
2001
, “
Fabrication techniques to Realize CMOS-Compatible Microfluidic Microchannels
,”
Journal of Microelectromechanical Systems
, Vol.
10
, No.
2
, pp.
286
–
297
7.
Walsh, Ken, Norville, Julie, and Tai, Yu-Chong, 21–25 Jan 2001, “Photoresist as a sacrificial layer by dissolution in acetone,” Micro-electro mechanical systems, MEMS 2001, the 14th IEEE International Conference, pp. 114–117
8.
Liu, J., and Tai, Y.-C., Feb 7–10 1993, “In situ monitoring and universal modeling of sacrificial psg etching using hydrofluoric acid,” in Proc. IEEE MEMS ’93, Int. Conf. on MEMS, Fort Lauderdale, FL, pp. 71–76.
9.
LeMinh
P.
,
Holleman
J.
,
Wallinga
H.
,
Berenschot
J. W.
,
Tas
N. R
, and
Berg
A van den
,
2003
, “
Novel integration of a microchannel with a silicon light emitting diode antifuse
,”
J. Micromech. Microeng
,
3
, pp.
425
–
429
10.
Reed
Hollie A.
,
White
Celesta E.
,
Rao
Vikram
,
Ann
Sue
,
Allen
Bidstrup
,
2001
, “
Fabrication of microchannels using polycarbonates as sacrificial materials
,”
Journal of Micromechanics and Microengineering
,
11
, pp.
733
–
737
.
11.
Baker
Michael D.
,
Williams
Frances R.
, and
May
Gary S.
, May
1998
, “
A Novel In Situ Monitoring Technique for Reactive, Ion Etching Using a Surface Micromachined Sensor
,”
IEEE Transactions on semiconductor manufacturing
, Vol.
11
, No.
2
, pp.
254
–
265
12.
Nastaushev
Yu. V.
,
Prinz
V. Ya.
, and
Svitasheva
S. N.
,
2005
, “
A technique for fabricating Au/Ti micro- and nanotubes
,”
Nanotechnology
,
16
, pp.
908
–
912
13.
Hack, Harvey P., 1988, Galvanic Corrosion, ASTM, 1916 Race Street, Philadelphia, PA 11103, pp. 5
14.
Baboian, Robert, 1995, Corrosion test and standards: Application and interpretation, ASTM, 1916 Race Street, Philadelphia, PA 11103, pp. 76
15.
Laque, F.L. and Copson, H.R., 1963, Corrosion resistance of metals and alloys, second edition, Reinhold Publishing Corporation, New York, pp. 448
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