The low temperature fabrication of passive electrical components (resistor, capacitor) on flexible substrates is presented in this paper. A drop-on-demand (DOD) ink-jetting system was used to print passive electrical components from gold nano-particles suspended in Alpha-Terpineol solution on a flexible polymer substrate. PVP (poly-4-vinylphenol) in PGMEA (propylene glycol monomethyl ether acetate) solvent was inkjet-printed as dielectric layer for capacitor. A pulsed laser beam was irradiated to produce finer electrical components, thereby overcoming the inherent limitation of inkjet processing. A continuous Ar laser beam was irradiated locally to evaporate carrier solvent as well as to cure the gold nano-particles in order to improve the electrical resistivity. Conductor lines and capacitors were fabricated on polymer substrate and their performance was analyzed.

Volume Subject Area:
Integration and Packaging of Micro/Nano/Electronic Systems
Keywords:
Flexible electronics, nanoparticle, gold, inkjet, laser ablation and sintering
Topics:
Flexible electronics, Lasers, Low temperature, Manufacturing, Nanoparticles, Capacitors, Electrical components, Laser beams, Polymers, Electrical resistivity, Ethers (Class of compounds), Inks, Laser ablation, Resistors, Sintering, US Department of Defense
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