This paper presents a fabrication technology to create a double roughened PDMS structure for a superhydrophobic surface. The fabricated surface has many application potentials, including on-chip micro liquid processor and water repellent coating. Similar structure can be found in nature on a lotus leaf (Fig. 1.) Due to its superhydrophobic surface, lotus leaf repels water and in the process performs self-cleaning [1]. In this paper, we show the combination of Nanosphere Lithography (NSL), plasma etching, and molding technique to create the micro/nano integrated double structure using PDMS. Also described is the design procedure and experimental results for the double-structured superhydrophobic surface.

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