Titanium has been widely used as a biomedical material in orthopedics, dentistry, cardiology, and cardiovascular surgery due to the excellent biostability and biocompatibility that results from its spontaneous formation of a highly passivating oxide layer in air and blood. However, little research has been done on the development of titanium for bioMEMS applications. This is likely due to the immaturity of titanium bulk micromachining technology to date. Here we report the application of new high-aspect-ratio bulk titanium micromachining techniques recently developed within our group towards the fabrication of a titanium-based multi-frequency traveling wave dielectrophoresis (DEP) device targeted for the separation of bioparticles. The device serves to illustrate the potential of these techniques for enabling the realization of novel bioMEMS devices with enhanced functionality and capability.
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ASME 2004 International Mechanical Engineering Congress and Exposition
November 13–19, 2004
Anaheim, California, USA
Conference Sponsors:
- Microelectromechanical Systems Division
ISBN:
0-7918-4714-4
PROCEEDINGS PAPER
Titanium Bulk Micromachining for BioMEMS Applications: A DEP Device as a Demonstration Available to Purchase
Yanting Zhang,
Yanting Zhang
University of California at Santa Barbara
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Emily R. Parker,
Emily R. Parker
University of California at Santa Barbara
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Masa P. Rao,
Masa P. Rao
University of California at Santa Barbara
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Marco F. Aimi,
Marco F. Aimi
University of California at Santa Barbara
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Igor Mezic,
Igor Mezic
University of California at Santa Barbara
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Noel C. MacDonald
Noel C. MacDonald
University of California at Santa Barbara
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Yanting Zhang
University of California at Santa Barbara
Emily R. Parker
University of California at Santa Barbara
Masa P. Rao
University of California at Santa Barbara
Marco F. Aimi
University of California at Santa Barbara
Igor Mezic
University of California at Santa Barbara
Noel C. MacDonald
University of California at Santa Barbara
Paper No:
IMECE2004-62136, pp. 45-48; 4 pages
Published Online:
March 24, 2008
Citation
Zhang, Y, Parker, ER, Rao, MP, Aimi, MF, Mezic, I, & MacDonald, NC. "Titanium Bulk Micromachining for BioMEMS Applications: A DEP Device as a Demonstration." Proceedings of the ASME 2004 International Mechanical Engineering Congress and Exposition. Microelectromechanical Systems. Anaheim, California, USA. November 13–19, 2004. pp. 45-48. ASME. https://doi.org/10.1115/IMECE2004-62136
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