A 2μm-thick frequency-tunable microresoantor capable of either increasing or decreasing its resonant frequency by a combination of Joule heating and electrostatic force has been successfully demonstrated for the first time. For the heating voltage increase from 0 to 2V under fixed bias voltage of 40V, the resonant frequency changes from 22.2kHz to 16.2kHz, resulting in the 27% reduction in the resonant frequency. For the bias voltage change from 20V to 40V under the heating voltage of 0V, the resonant frequency increase from 19.0kHz to 23.6kHz, resulting in the 24.2% increase in the resonant frequency. As such, this surface-micromachined microactuator could assist complicated frequency tuning for applications of microsensors and microactuators.

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