Mass sensing based on parametric resonance has shown high sensitivity and has many potential applications in chemical and biological sensing. We investigate noise effects on the sensitivity of mass sensing using parametric resonance. Temperature fluctuation noise, Johnson noise, and Brownian motion noise have been considered. Numerical simulation and experimental results show that noise affects the sensitivity of parametric resonance mass sensing in different mechanism from simple harmonic resonance based mass sensor and Brownian motion noise of the micro-oscillator has the major contribution to the frequency uncertainty at the boundary of parametric resonance area and the sensitivity in mass sensing.

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