We report microfabricated tunable capacitors based on plastically deformed vertical comb sets using a batch process. The arrangement of cascaded comb finger sets and the uniqueness of the angular vertical comb actuators enable large tuning ratio with a small angular displacement. The capacitors are made of 50μm-thick single-crystal silicon on SOI wafer and actuated by self-aligned vertical comb-sets giving a tuning ratio of 4.93 from 0.194 to 0.96pF with a tuning voltage of 100 Volts. As such, this tunable capacitor could find applications in RF communication such as parametric amplifiers, harmonic frequency generators and voltage-controlled oscillators.

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