This paper presents the characterization of scratch drive actuators (SDAs) built using Sandia National Laboratories (SNL) SUMMiTTM V micromachining process. Experimental data is used to characterize the output step size as a function of input voltage. This data is correlated to an analytical model in an effort to better understand and predict the stepping motion of these devices. The experimental results match well with the predictions from the model. Experimental data shows that the step sizes are on the order of 10 nm, and force estimates show that one SDA is capable of producing forces in excess of 100 μN for each step.

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