The thermoelastic damping (TED), one of the main energy lost sources in MEMS and NMEMS, is analyzed for the longitudinal vibration mode. Two approximations based on the insulated thermal boundary condition (B.C.) and the modified fixed temperature B.C. are developed and compared. Until now, the highest reported experimental Q factors for the longitudinal vibrating MEMS device are still more than one order less than the predicted TED Q factors. Therefore, a numerical simulation approach is proposed and used for validation. The aim of this paper is to provide a prediction of TED for the fast developing bulk mode micro and sub-micro oscillators operating in a longitudinal vibrating mode.

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