It has been experimentally shown that surface texturing (roughening) decreases the effect of intermolecular adhesion forces that are significant in MEMS applications. These forces can hinder normal operation of sensors and actuators as well as micro-engines where they might increase friction, which could be catastrophic. In this paper, a model that predicts the effects of roughness, asymmetry, and flatness on the adhesion, contact, and friction forces in MEMS interfaces is presented. The three key parameters used to characterize the roughness the asymmetry and the flatness of a surface topography are the root-mean-square roughness (RMS), skewness and kurtosis, respectively. It is predicted that surfaces with high RMS, high kurtosis and positive skewness exhibit lower adhesion and static friction coefficient, even at extremely low external normal forces.
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ASME 2003 International Mechanical Engineering Congress and Exposition
November 15–21, 2003
Washington, DC, USA
Conference Sponsors:
- Nondestructive Evaluation Division
ISBN:
0-7918-3724-6
PROCEEDINGS PAPER
Modeling the Effect of Surface Roughness on the Adhesion, Contact and Friction in Micro-Electro-Mechanical Systems (MEMS) Interfaces Available to Purchase
Noureddine Tayebi,
Noureddine Tayebi
University of Illinois at Urbana-Champaign, Urbana, IL
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Andreas A. Polycarpou
Andreas A. Polycarpou
University of Illinois at Urbana-Champaign, Urbana, IL
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Noureddine Tayebi
University of Illinois at Urbana-Champaign, Urbana, IL
Andreas A. Polycarpou
University of Illinois at Urbana-Champaign, Urbana, IL
Paper No:
IMECE2003-41301, pp. 75-82; 8 pages
Published Online:
May 12, 2008
Citation
Tayebi, N, & Polycarpou, AA. "Modeling the Effect of Surface Roughness on the Adhesion, Contact and Friction in Micro-Electro-Mechanical Systems (MEMS) Interfaces." Proceedings of the ASME 2003 International Mechanical Engineering Congress and Exposition. Nondestructive Evaluation. Washington, DC, USA. November 15–21, 2003. pp. 75-82. ASME. https://doi.org/10.1115/IMECE2003-41301
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