Micro electro-mechanical systems (MEMS) technology opens up new ways of miniaturizing electromagnetic motors. A very promising approach for building miniature linear actuators is to fabricate the stator as well as the traveler separately and merging the motor components in a microassembly process [1]. This paper describes design, fabrication, and evaluation results of a linear synchronous actuator following this basic approach.
Volume Subject Area:
Microelectromechanical Systems
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