Micro electro-mechanical systems (MEMS) technology opens up new ways of miniaturizing electromagnetic motors. A very promising approach for building miniature linear actuators is to fabricate the stator as well as the traveler separately and merging the motor components in a microassembly process . This paper describes design, fabrication, and evaluation results of a linear synchronous actuator following this basic approach.
A Batch Fabricated Linear Synchronous Motor
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Fo¨hse, M, Sto¨lting, H, Edler, J, & Gatzen, HH. "A Batch Fabricated Linear Synchronous Motor." Proceedings of the ASME 2003 International Mechanical Engineering Congress and Exposition. Microelectromechanical Systems. Washington, DC, USA. November 15–21, 2003. pp. 693-700. ASME. https://doi.org/10.1115/IMECE2003-41388
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