Measurement of LIGA parts is critical for characterization and understanding of process variables. Traditionally, measurement using coordinate metrology consists of collecting data points from all of the surfaces of a part (e.g., three dimensional data) and comparing these points with target geometry as defined in a CAD file. Systems such as coordinate measurement machines and laser scanners are often used to collect the data. Unfortunately, three dimensional data collection has proven to be quite difficult for mesoscale parts, such as those created using the LIGA process. The inspection techniques used for larger parts cannot be used for parts of this scale because of physical limitations or poor resolution. This paper targets the use of white light interferometry for the analysis of micro-components produced using the LIGA and stereolithography processes. Both of these processes often create parts that are designed to have a constant cross section with planar top and bottom surfaces. Assuming this geometric relationship holds true, the analysis of just the top or bottom surface of the part can provide useful information pertaining to process capability and part geometry. White light interferometry is well-suited to the measurement of these planar surfaces. This paper will discuss techniques used to analyze two dimensional part parameters using white light interferometry in combination with image processing techniques. Several case studies are included to show the abilities of the measurement and processing methods.
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ASME 2003 International Mechanical Engineering Congress and Exposition
November 15–21, 2003
Washington, DC, USA
Conference Sponsors:
- Microelectromechanical Devices Division
ISBN:
0-7918-3721-1
PROCEEDINGS PAPER
Using White Light Interferometry for Mesoscale Part Inspection Available to Purchase
K. Meghan Shilling,
K. Meghan Shilling
Georgia Institute of Technology, Atlanta, GA
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Thomas R. Kurfess
Thomas R. Kurfess
Georgia Institute of Technology, Atlanta, GA
Search for other works by this author on:
K. Meghan Shilling
Georgia Institute of Technology, Atlanta, GA
Thomas R. Kurfess
Georgia Institute of Technology, Atlanta, GA
Paper No:
IMECE2003-42328, pp. 293-298; 6 pages
Published Online:
May 12, 2008
Citation
Shilling, KM, & Kurfess, TR. "Using White Light Interferometry for Mesoscale Part Inspection." Proceedings of the ASME 2003 International Mechanical Engineering Congress and Exposition. Microelectromechanical Systems. Washington, DC, USA. November 15–21, 2003. pp. 293-298. ASME. https://doi.org/10.1115/IMECE2003-42328
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