The characterization of material properties and mechanical performance of micro-electromechanical devices often hinges on the accurate measurement of small forces. Calibrated load cells of appropriate size and range are used, but are often not calibrated in a fashion traceable to the International System of Units (SI). Recently, we calibrated a piezoresistive cantilever in terms of SI force sensitivity. Here, we employ this device as a secondary force standard to calibrate another, optical lever based sensor in a force probe instrument, demonstrating an unbroken tracability chain to appropriate national standards.

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