Undesirable adhesion in microelectromechanical systems (MEMS) is referred to as stiction and is a principal failure mechanism in surface-micromachined MEMS devices. Adhesive failures can occur in a number of ways. The adhesive failures that occur during the release stage, which includes the etching of sacrificial layers, the subsequent chemical treatments, and the drying processes, are referred to as release-related stiction and failures that occur while the device is in operation are referred to as in-use stiction. A method of repairing these stiction-failed structures released from isopropyl alcohol (IPA) by Nd:YAG laser irradiation is described by Rogers et al. [1]. The current paper reports the effectiveness of the laser repair process and the corresponding thermomechanical model predictions for microcantilevers that have failed due to release from water, octadecyltrichlorosilane (OTS) and supercritical CO2 drying, along with IPA released structures. The paper also discusses the efficiency of the model and the laser repair process for devices that have failed due to in-use stiction. The results show that the laser repair process is very effective for both failure modes and that the model predicts the laser repair of cantilevers that have failed due to release-related stiction much better than for in-use stiction failed cantilevers.

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