The main object of the paper is the implementation of two different approaches for the estimation of the modulus of elasticity and of the failure strain/stress in micro machined structures manufactured of epitaxial polycrystalline silicon (15 μm thick film). The micro-test-structures are produced using a standard THELMA process becoming an integral part of a MEMS actuator of comb-finger type. The micro-motor is designed to develop electrostatic in plane forces of desired intensity when fed by suitable electric potential difference.

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