Grinding for the commercial fused quartz glass was carried out to induce the artificial defects on the specimens. The short-range ordering structures for the ground samples were analyzed by the micro Raman spectroscopy. The roughness for the ground samples was analyzed using atomic force microscopy (AFM) and power spectral density (PSD) curve. Thermal treatments were performed to analyze the annealing effect. As results, the Raman spectral shift showed that the machining induces residual tensile stress on the surface. The damages by mechanical process lowered the crystallization temperature of the fused quartz glass. However, the proper thermal annealing could relax the process-induced damages. Therefore, the thermal annealing should be considered together with process-induced damage to optimize the mechanical process for the fused quartz glass.

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