In this paper, we present a paradigm which prescribes a procedure for a systematic design, analysis and development of nanopositioning devices. In this effort, we have used many tools from modern control theory to model devices, to quantify device resolution, bandwidth, range, and robustness, and to tackle undesirable nonlinear effects such as hysteresis and creep. The implementation of this procedure for the simultaneous achievement of robustness, high precision, and high bandwidth objectives is presented. The merits of the paradigm are demonstrated through experimental results.

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