We analyze steady one-dimensional plane Couette flows in the entire Knudsen regime with the objective of modelling shear-driven rarefied gas flows encountered in various micro electromechanical system (MEMS) applications. In particular, we develop a unified empirical model, which includes analytical expressions for the velocity distribution and shear stress. The new model is validated by comparisons with the linearized Boltzmann solutions available in the literature, as well as hard-sphere direct simulation Monte Carlo (DSMC) results. Overall, the new model predicts the velocity distribution and shear stress with good accuracy for a wide range of Knudsen numbers (0 < Kn ≤ 12), and it is valid for incompressible or low subsonic compressible flows (Ma ≤ 0.3).

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