Advanced OEH Methodology for Evaluation of Microelectronics and Packaging

With the microelectronics industry being one of the most dynamic, in terms of new technologies, electronic packages have to be designed and optimized for new and ever more demanding applications in relatively short periods of time. In addition, for certain applications, the nondestructive testing (NDT) of electronic packages may be needed, especially for applications requiring noninvasive, full-field-of-view, real-time testing the behavior of a specific package subjected to actual operating conditions. This type of NDT can be accomplished by application of optical techniques and, in particular, speckle phase correlation techniques in the form of optoelectronic holography (OEH). In this paper, advanced OEH techniques are described and representative applications of OEH for the effective characterization of microelectronic components and packages are presented.