Functional operation of RF MEMS resistive switches depends on dynamic characteristics of the cantilever contacts. Characteristics of these contacts, in turn, depend on parameters defining their shape and dimensions, material properties, boundary conditions, and actuation voltages. In this paper, a simple analytical model is presented and used to develop an understanding of the switch behavior. In addition, uncertainties corresponding to this model are also determined to quantitatively show the influence that various parameters defining the cantilever contact have on its dynamics which, in turn, influences performance of the RF MEMS switch. This performance can be optimized with the objective of achieving resonance frequency within, e.g., 1% of the desired value while constraining the nominal dimensions and finding the optimum set of uncertainties in these dimensions. Analytical results correlate well with the preliminary experimental characterization of the contacts.

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