Finite element modeling of MEMS piezoelectric clamped-clamped beam resonators is investigated using a design matrix consisting of beams of varying length and film thickness. Laser Doppler vibrometry was performed on fabricated devices to obtain frequency response, modeshapes, and deflection magnitudes at resonance. The mechanical testing showed an unexpected nonlinearity at resonance in both the frequency response and the modeshapes. Finite element analysis of the beams is presented and the results compared to test data. The model is shown to predict natural frequency well, but the nonlinear modeshapes prevent the accurate prediction of displacement magnitude and modeshape. Evidence is offered from both testing and a finite element buckling model suggesting that the nonlinearity is due to piezoelectrically-induced buckling in the beams.

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