This paper describes the SUMMiT® V Design Tools, a suite of CAD tools that enable a SUMMiT® (Sandia Ultra-Planar Multilevel MEMS Technology) MEMS designer to meet the ‘Design-To-Analysis’ challenge. Sandia has developed a MEMS design tool suite integrated with a commercial 3D mechanical CAD tool, AutoCAD®. Designed for use with the SUMMiT® process, it includes in-house written design tools: a 2D Process Visualizer [2], a fast 3D Visualizer, a detailed 3D Model Generator [3], a finite element mesh generator [4], a library of standard components [5], and a Design Rule Check system [6].

Volume Subject Area:
Microelectromechanical Systems
Topics:
Design, Microelectromechanical systems, Generators, Computer-aided design, Finite element analysis, Mechanical computer-aided design, Three-dimensional models
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Copyright © 2002
 by ASME
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