In this paper, we present the design, fabrication and testing of an electromagnetic squeezing microactuator, which generates a laterally-driven squeezing motion for application to the microinjectors. A set of electroplated flexible copper microstrip pairs is fabricated by using the thick PR micromold. In the experimental study, we measured the static response of the electromagnetic squeezing microactuators as well as the dynamic response in the vacuum, air and water environments. We also measured the pumping volume of the present electromagnetic squeezing microactuators as 20pl/cycle for DI water.
Electromagnetic Squeezing Microactuators Using Laterally-Driven Flexible Copper Strip
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Kang, TG, Cho, Y, Baek, OH, & Moon, JH. "Electromagnetic Squeezing Microactuators Using Laterally-Driven Flexible Copper Strip." Proceedings of the ASME 2002 International Mechanical Engineering Congress and Exposition. Microelectromechanical Systems. New Orleans, Louisiana, USA. November 17–22, 2002. pp. 225-228. ASME. https://doi.org/10.1115/IMECE2002-33315
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