Heat Transfer in a MEMS for Determination of Fluid and Flow Characteristics

The paper presents an one-dimensional model for the heat transfer in a limited but significant zone of an actuator-sensor structure for the determination of fluid and flow characteristics. As an essential step for the designing process of this structure, the usefulness of the model in the framework of the structure’s functionality is underlined. The main heat transfer mechanisms are detailed by qualitative and quantitative evaluations. Finally we compare the data obtained by simulating this model with the experimental data. The modeling errors are discussed. The achieved results might be used directly or adapted for various thermal based sensors for flow measurement both in micro and macro world.